Specifications
Dimensional diagram
(When AF Module is mounted)
Printed in Japan (0209-03)T
Code No. 2CE-KWLH-1
This brochure is printed on recycled paper made from 40% used material.
Observation method Brightfield, darkfield, DIC, simple polarizing
Main body Episcopic stand, Power supply built-in
Focusing mechanism Stroke: 29mm, Coarse: 12.7mm per rotation
(torque adjustable, focusing stop mechanism
provided), Fine: 0.1mm per rotation (in 1µm
increments), Guide: 4-guide (two roller-race,
torque adjustable)
Episcopic illuminator Motorized aperture diaphragm (centerable,
pinhole slider incorporated )
Fixed field diaphragm (with focus target), Four
ø25mm filters (NCB11/ND4,16) can be mounted;
Polarizer, Analyzer
Light sources 100W halogen, 150W metal halide, 100W mercury,
75W Xenon
Eyepiece tube UW tilting trinocular eyepiece tube (tilt angle: 0˚-
30˚; erect images), F.O.V.: 25mm, Optical path
changeover: 2-way (Bino: Photo 100:0/0:100)
Nosepiece Fixed-motorized sextuple universal nosepiece
(centarable), Highly durable
Stage 8x8 Stage, Cross travel: 205 x 205 mm,
Coarse/fine-movement changeover: manual,
Wafer holders: 4-8 in., Mask holders: 4-6 in.
Control Front panel: Nosepiece rotation buttons,
Episcopic aperture diaphragm stop buttons, Light
intensity control knob
Remote control: LCD panel, Magnification
changeover, Motorized Z-axis, Episcopic aperture
diaphragm stop buttons, Light intensity control
knob, Motorized bright/darkfield changeover key,
DIC adjustment knob, Option keys
Eyepieces CFI eyepiece lens series
Objectives CFI LU/L Plan series
Auto focus unit Optional (LED)
Automated function Recipe Programming
Communication RS-232C
Weight Approx. 45kg (when 8x8 Stage and UW eyepiece
tube are used.)
Unit: mm (inch)
NIKON INSTECH CO., LTD.
Parale Mitsui Bldg.,8, Higashida-cho, Kawasaki-ku,
Kawasaki, Kanagawa 210-0005, Japan
phone: +81-44-223-2175 fax: +81-44-223-2182
http://www.ave.nikon.co.jp/inst/
NIKON INSTRUMENTS EUROPE B.V.
P.O. Box 222, 1170 AE Badhoevedorp, The Netherlands
phone: +31-20-44-96-222 fax: +31-20-44-96-298
http://www.nikon-instruments.com/
NIKON INSTRUMENTS INC.
1300 Walt Whitman Road, Melville, N.Y. 11747-3064, U.S.A.
phone: +1-631-547-8500; +1-800-52-NIKON (within the U.S.A.only) fax: +1-631-547-0306
http://www.nikonusa.com/
NIKON CANADA INC.
CANADA phone: +1-905-625-9910 fax: +1-905-625-0103
NIKON FRANCE S.A.
FRANCE phone: +33-1-45-16-45-16 fax: +33-1-45-16-00-33
NIKON GMBH
GERMANY phone: +49-211-9414-0 fax: +49-211-9414-322
NIKON INSTRUMENTS S.p.A.
ITALY phone: + 39-55-3009601 fax: + 39-55-300993
NIKON AG
SWITZERLAND phone: +41-1-913-62 00 fax: +41-1-910-37 44
NIKON UK LTD.
UNITED KINGDOM phone: +44-20-8541-4440 fax: +44-20-8541-4584
NIKON SINGAPORE PTE LTD
SINGAPORE phone: +65-5593618 fax: +65-5593668
NIKON MALAYSIA SDN. BHD.
MALAYSIA phone: +60-3-78763887 fax: +60-3-78763387
