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Teledyne API – Model T700 Dynamic Dilution Calibrator Calibration and Verification
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In the displays associated with the FLOW STAT submenu:
The numbers after “F=” are the flow.
The first number is the target flow.
The second is the actual flow.
The number after “P=” is pressure in PSIG.
If an MFC is off, its flows are displayed as OFF.
7.2. CALIBRATING THE OUTPUT OF THE T700’S MFC’S
A table exists in the memory of the T700’s for each MFC that sets the output of the
MFC at each of 20 equally spaced control points along its entire performance range.
This table may be accesses via the DIAG MFC CONFIGURATION submenu (see
Section 7.2.2).
For each calib
ration point, the following is displayed:
The drive voltage in 20 equal, incremental steps from 0 mVDC to 5000 mVDC;
The expected flow rate corresponding to each drive voltage point (each equal
to1/20th of the full scale for the selected mass flow controller).
This table can also be used to calibrate the output of the MFCs by adjusting either the
control voltage of a point or its associated flow output value (see Section 7.2.2).
Table 7-1: Examples of MFC Calibration Points
MFC FULL SCALE
1.0 LPM 3.0 LPM 5.0 LPM 10.0 LPM
CAL
POINT
DRIVE
VOLTAGE
MFC TARGET OUTPUT
0 000 mV 0.000 0.000 0.000 0.000
1 250 mV 0.050 0.150 0.250 0.500
2 500 mV 0.100 0.300 0.500 1.000
3 750 mV 0.150 0.450 0.750 1.500
4 1000 mV 0.200 0.600 1.000 2.000
5 1250 mV 0.250 0.750 1.250 2.500
6 1500 mV 0.300 0.900 1.500 3.000
7 1750 mV 0.350 1.050 1.750 3.500
8 2000 mV 0.400 1.200 2.000 4.000
9 2250 mV 0.450 1.350 2.250 4.500
10 2500 mV 0.500 1.500 2.500 5.000
11 2750 mV 0.550 1.650 2.750 5.500
12 3000 mV 0.600 1.800 3.000 6.000
13 3250 mV 0.650 1.950 3.250 6.500
14 3500 mV 0.700 2.100 3.500 7.000
15 3750 mV 0.750 2.250 3.750 7.500
16 4000 mV 0.800 2.400 4.000 8.000
17 4250 mV 0.850 2.550 4.250 8.500
18 4500 mV 0.900 2.700 4.500 9.000
19 4750 mV 0.950 2.850 4.750 9.500
20 5000 mV 1.000 3.000 5.000 10.000
06873B DCN6388